As technology advances, the demand for higher-performance semiconductors comes in, and we are looking towards tomorrow to develop and innovate. Utilising the knowledge and technology that we’ve been cultivating in the development of photoresists, we’ve created a new semiconductor material – Nanoimprint Resist. It helps to reduce costs and energy consumption in the manufacturing of advanced semiconductors and improve throughput and yield – common issues for the practical application of nanoimprint lithography.
A closer look
A newly designed semiconductor material has a molecular structure optimised for Nanoimprint Lithography technology. It was developed based on a detailed analysis of the resist’s flow behaviour during the imprinting process and the interaction of the resist with wafer surfaces and masks.
The Nanoimprint Resist allows you to quickly and uniformly fill in the complex circuit patterns engraved on the mask, and transfer and form nanometer-scale circuit patterns in a short time. More than that, after curing by UV radiation, it shows excellent mold-releasing properties that do not cause loss of circuits even when the mask is removed at high speed.
We’ve also enhanced it with the benefits of inkjet technology. Utilising our experience with industrial inkjet printers, we’ve designed a formulation that allows the optimum amount of droplets to be applied to the wafer surface using an inkjet method. Compared to the spin-coating method used in the current manufacturing process, this saves loads of resist used, reducing the amount to approximately 1/100.
The Nanoimprint Resist uses a hydrocarbon compound as a release agent instead of per- and polyfluoroalkyl substances (PFAS), going for a safer alternative.
We aim to use this latest addition, tailored for cutting-edge semiconductor needs, to meet rising customer demands and industry challenges, driving innovation in the sector. The new material will be provided to the Japanese market through FUJIFILM Electronics Materials Corporation, our core company in the electronic materials business. Curious to know more? Check here.
